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China Rare Metal Material Co.,Limited
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Tungsten Titanium (WTi) Alloy Sputtering Target
Purity --- >99.99%, 99.995% 90/10 wt%, 80/20wt%, custom-made
Density --- >14.44g/cm3
Shape --- Discs, Rectangle, Step, Plates, Sheets, Rods, Custom-Made
Dimension --- Diameter (≤300mm), Length (≤500mm), Width (≤300mm), Thickness (≥1mm), Custom-Made
Application --- Coating for Semiconductor, be used as diffusion barrier for advanced packaging, e.g. Flip-Chip technology, and in a variety of compounds.
Impurity Contents(in ppm) --- C: 80, N: 90, O:1100, S:20, H:100, Cl: 2 , P: 2, Fe: 200, Mn: 80, Si: 100, F,Na,La,K: 0
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